Maskless Lithography System
Sub-micron resolution Maskless Lithography tool with extremely fastpatterning speed.
Easy to create 3D structure onto photo-resist.
Inspection & Metrology Systems
Inspection tools for defects on outside or inside at Si-Wafer or Glass substrate with our unique optics and image processing technology.
Wafer ID Reader
An optical illumination unit for the purpose of reading alphanumberic, barcode and 2D codes which have been laser-inscribed or exposed and etched onto silicon wafers.
Our in-house designed specialty telecentric lens and illumination system provides clear images to the reading software to allow extremely accurate recognition.