Visual Inspection Systems

Visual Inspection equipments for defects on outside or inside at Si-Wafer or glass substrate with our unique optical and image processing technology.

Inspection Target : Edge

Defects such as chips and cracks in edge inspection are detected with our unique optical and image processing technologies.

Inspection Target : Back/ Front Surface

Defects such as particles and scratches in backside and surface inspection are detected with our unique optical and image processing technologies.

Inspection Target: Pinhole (AirPocket)

Detects pinholes (air pockets) and other defects in surface and internal inspections using proprietary optical and image processing technologies.

Equipment Line-up

• Edge Inspection Equipment
• Back&Front Surface Equipment
• Edge／Back／Front Surface／Pinhole(Airpocket) Equipment